Wet chemical processing equipment - メーカー・企業と製品の一覧 | イプロス

Semiconductor device 'BATCHSPRAY Clean Autoload'

100% focus on BATCHSPRAY technology! Significantly reduces water, exhaust, and chemicals [Wet chemical equipment for the semiconductor industry] Fully automatic equipment.

This 4-chamber system is characterized by its ability to achieve excellent process results by combining mixed chemicals at the time of use with a patented retainer comb treatment system. By using SicOzone instead of peroxides or sulfuric acid for sustainable processes such as cleaning and resist stripping, it can reduce the consumption of chemicals and deionized water by up to 90%. 【Features】 ■ Throughput of up to 600 wph ■ Four process chambers ■ Installation area of less than 12 m² ■ Highly diluted disposable chemicals ■ No need for sulfuric acid or peroxides *For more details, please refer to the PDF document or feel free to contact us.